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dc.contributor.author이덕중-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author장진-
dc.date.accessioned2024-01-13T17:03:57Z-
dc.date.available2024-01-13T17:03:57Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109337-
dc.subjectFEA-
dc.title.alternativeFED의 실장 공정 시 진공 효율 향상에 관한 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation물리학회 춘계학술발표회, pp.201-
dc.citation.title물리학회 춘계학술발표회-
dc.citation.startPage201-
dc.citation.endPage201-
dc.citation.conferencePlaceKO-
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