DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.author경제홍-
dc.contributor.authorCHO SEONG HOON-
dc.contributor.authorHAN SUNG HAN-
dc.contributor.author최승철-
dc.date.accessioned2024-01-13T17:04:36Z-
dc.date.available2024-01-13T17:04:36Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109377-
dc.languageEnglish-
dc.subjectAlN-
dc.subjectMOCVD-
dc.subjectsingle precursor-
dc.titleAluminum nitride thin film deposition using noble single precursor by MOCVD-
dc.title.alternative유기금속화합물을 이용한 질화알루미늄(AlN) 박막 제조-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation1999년도 춘계총회, 초청·특별강연, 연구발표회, pp.102-
dc.citation.title1999년도 춘계총회, 초청·특별강연, 연구발표회-
dc.citation.startPage102-
dc.citation.endPage102-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE