Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조정희 | - |
dc.contributor.author | HAN SEUNG HEE | - |
dc.contributor.author | LEE YEON HEE | - |
dc.contributor.author | 김영우 | - |
dc.contributor.author | LIM HYUN EUI | - |
dc.contributor.author | 김곤호 | - |
dc.contributor.author | 김옥경 | - |
dc.date.accessioned | 2024-01-13T17:31:02Z | - |
dc.date.available | 2024-01-13T17:31:02Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/109423 | - |
dc.subject | PSII | - |
dc.title.alternative | Internal antenna 를 이용한 inductively coupled plasma 내에서 발생된 이온의 존재비율 측정 | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 제 16 회 한국진공학회, pp.166 | - |
dc.citation.title | 제 16 회 한국진공학회 | - |
dc.citation.startPage | 166 | - |
dc.citation.endPage | 166 | - |
dc.citation.conferencePlace | KO | - |
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