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Other Titles

Internal antenna 를 이용한 inductively coupled plasma 내에서 발생된 이온의 존재비율 측정

Authors

조정희; HAN SEUNG HEE; LEE YEON HEE; 김영우; LIM HYUN EUI; 김곤호; 김옥경

Citation

제 16 회 한국진공학회, pp.166

Keywords

PSII

URI

https://pubs.kist.re.kr/handle/201004/109423

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KIST Conference Paper > Others

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