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dc.contributor.author조정희-
dc.contributor.authorHAN SEUNG HEE-
dc.contributor.authorLEE YEON HEE-
dc.contributor.author김옥경-
dc.contributor.author김곤호-
dc.contributor.author김영우-
dc.contributor.authorLIM HYUN EUI-
dc.contributor.authorSUH MOO JIN-
dc.date.accessioned2024-01-13T17:31:24Z-
dc.date.available2024-01-13T17:31:24Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109445-
dc.languageEnglish-
dc.subjectquadrupole mass analyzer-
dc.titleThe measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationFifth International Workshop on Plasma-Based Ion Implantation-
dc.citation.titleFifth International Workshop on Plasma-Based Ion Implantation-
dc.citation.endPage34-
dc.citation.conferencePlaceJA-
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