KIST Library Institutional Repository

The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation

Authors

조정희; HAN SEUNG HEE; LEE YEON HEE; 김옥경; 김곤호; 김영우; LIM HYUN EUI; SUH MOO JIN

Citation

Fifth International Workshop on Plasma-Based Ion Implantation

Keywords

quadrupole mass analyzer

URI

https://pubs.kist.re.kr/handle/201004/109445

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML