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dc.contributor.author하원호-
dc.contributor.authorKANG HO KWAN-
dc.contributor.authorKIM MIN CHEOL-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김도훈-
dc.contributor.author최종술-
dc.date.accessioned2024-01-13T17:32:47Z-
dc.date.available2024-01-13T17:32:47Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109531-
dc.languageEnglish-
dc.subjectmicrobolometer-
dc.subjectMEMS-
dc.subjectPECVD-
dc.subjectVOx-
dc.titleFabrication of microbolometer using polyimide sacrificial layer-
dc.title.alternative폴리이미드 희생층을 이용한 마이크로 볼로미터의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation1999년도 대한전기학회 추계학술대회 논문집, pp.1137 - 1139-
dc.citation.title1999년도 대한전기학회 추계학술대회 논문집-
dc.citation.startPage1137-
dc.citation.endPage1139-
dc.citation.conferencePlaceKO-
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