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Fabrication of microbolometer using polyimide sacrificial layer

Other Titles

폴리이미드 희생층을 이용한 마이크로 볼로미터의 제작

Authors

하원호; KANG HO KWAN; KIM MIN CHEOL; Moon Sung Wook; OH MYUNG HWAN; 김도훈; 최종술

Citation

1999년도 대한전기학회 추계학술대회 논문집, pp.1137 - 1139

Keywords

microbolometer; MEMS; PECVD; VOx

URI

https://pubs.kist.re.kr/handle/201004/109531

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KIST Conference Paper > Others

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