DSpace at KIST: A modeling of electrostatic capacitance and moving force in comb actuator for controlling a micro-optical switch

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DC Field	Value	Language
dc.contributor.author	채경수	-
dc.contributor.author	Moon Sung Wook	-
dc.contributor.author	OH MYUNG HWAN	-
dc.contributor.author	PARK YOUNG KYUN	-
dc.contributor.author	Kim Seong Il	-
dc.contributor.author	PARK JEONG HO	-
dc.date.accessioned	2024-01-13T17:32:50Z	-
dc.date.available	2024-01-13T17:32:50Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/109535	-
dc.language	English	-
dc.subject	초소형 광스위치	-
dc.title	A modeling of electrostatic capacitance and moving force in comb actuator for controlling a micro-optical switch	-
dc.title.alternative	초소형 광스위치 제어를 위한 comb 액츄에이터에서의 정전용량과 구동력 모델링	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	센서학회지, v.10, no.1, pp.193 - 197	-
dc.citation.title	센서학회지	-
dc.citation.volume	10	-
dc.citation.number	1	-
dc.citation.startPage	193	-
dc.citation.endPage	197	-
dc.citation.conferencePlace	KO	-

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