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dc.contributor.author임재홍-
dc.contributor.authorYOON SEOK JIN-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorYoon Young Soo-
dc.date.accessioned2024-01-13T17:33:15Z-
dc.date.available2024-01-13T17:33:15Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109561-
dc.languageEnglish-
dc.subjectpiezoresistivity-
dc.titleFabrication of piezoresistive pressure sensor based on poly-Si-
dc.title.alternative벌크 마이크로 머쉬닝에 의한 다결정 실리콘 압력센서 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국센서학회 종합학술대회 논문집, pp.287 - 290-
dc.citation.title한국센서학회 종합학술대회 논문집-
dc.citation.startPage287-
dc.citation.endPage290-
dc.citation.conferencePlaceKO-
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