Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 임재홍 | - |
| dc.contributor.author | YOON SEOK JIN | - |
| dc.contributor.author | Ju Byeong Kwon | - |
| dc.contributor.author | Yoon Young Soo | - |
| dc.date.accessioned | 2024-01-13T17:33:15Z | - |
| dc.date.available | 2024-01-13T17:33:15Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/109561 | - |
| dc.language | English | - |
| dc.subject | piezoresistivity | - |
| dc.title | Fabrication of piezoresistive pressure sensor based on poly-Si | - |
| dc.title.alternative | 벌크 마이크로 머쉬닝에 의한 다결정 실리콘 압력센서 제작 | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국센서학회 종합학술대회 논문집, pp.287 - 290 | - |
| dc.citation.title | 한국센서학회 종합학술대회 논문집 | - |
| dc.citation.startPage | 287 | - |
| dc.citation.endPage | 290 | - |
| dc.citation.conferencePlace | KO | - |
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