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Fabrication of piezoresistive pressure sensor based on poly-Si

Other Titles

벌크 마이크로 머쉬닝에 의한 다결정 실리콘 압력센서 제작

Authors

임재홍; YOON SEOK JIN; Ju Byeong Kwon; Yoon Young Soo

Citation

한국센서학회 종합학술대회 논문집, pp.287 - 290

Keywords

piezoresistivity

URI

https://pubs.kist.re.kr/handle/201004/109561

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KIST Conference Paper > Others

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