DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.author박윤권-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박흥우-
dc.contributor.authorYoon Young Soo-
dc.contributor.authorSang-Seop Yom-
dc.contributor.authorOh Young-Jei-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorSUH SANG HEE-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김철주-
dc.date.accessioned2024-01-13T18:00:48Z-
dc.date.available2024-01-13T18:00:48Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109671-
dc.languageEnglish-
dc.subjectthermally isolating membrane-
dc.subjectuncooled IR-sensor-
dc.subjectdirect bonding-
dc.subjectpyroelectirc thin film-
dc.subjectsquare-shaped structure silicon substrate-
dc.subjectsacribicial layer-
dc.titleFabrication of un-cooled infrared sensor using pyroelectric thin film-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationConference on Device and Process Technologies for MEMS and Microelectronics, v.3892 (SPIE), pp.356 - 363-
dc.citation.titleConference on Device and Process Technologies for MEMS and Microelectronics-
dc.citation.volume3892 (SPIE)-
dc.citation.startPage356-
dc.citation.endPage363-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE