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MOCVD growth of AlN, GaN/Si using an N-atom source based on a dielect barrier discharge method

Authors

KIM JIN SANG; Kum Dong Wha; 이지화

Citation

Proc. 2nd Intern. Symp. on blue laser and light emitting diodes, Chiba, Japan, Sept. 29-Oct. 2, 1998, pp.476 - 479

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/109929

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KIST Conference Paper > Others

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