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dc.contributor.authorHAN JUN HYUN-
dc.contributor.authorSHIN MYUNG CHUL-
dc.contributor.authorS.H. Kang-
dc.date.accessioned2024-01-13T18:31:13Z-
dc.date.available2024-01-13T18:31:13Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109970-
dc.languageEnglish-
dc.subjectelectromigration-
dc.subjectCurrent Density Exponent-
dc.subjectBlack Equation-
dc.titleThe effect of grain structure on the current-density exponent in the black equation for Al-based interconnects-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationThe 4th International conference on Electronic Materials, 제주 , 한국 , 8 월 24 ∼ 27 일 (1998), pp.68-
dc.citation.titleThe 4th International conference on Electronic Materials, 제주 , 한국 , 8 월 24 ∼ 27 일 (1998)-
dc.citation.startPage68-
dc.citation.endPage68-
dc.citation.conferencePlaceKO-
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