Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박윤권 | - |
| dc.contributor.author | Ju Byeong Kwon | - |
| dc.contributor.author | 박흥우 | - |
| dc.contributor.author | PARK JEONG HO | - |
| dc.contributor.author | Sang-Seop Yom | - |
| dc.contributor.author | SUH SANG HEE | - |
| dc.contributor.author | OH MYUNG HWAN | - |
| dc.contributor.author | 김철주 | - |
| dc.date.accessioned | 2024-01-13T18:32:11Z | - |
| dc.date.available | 2024-01-13T18:32:11Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/110031 | - |
| dc.language | English | - |
| dc.subject | MEMS | - |
| dc.title | Etching-bonding-thin film deposition process for MEMS-IR SENSOR application | - |
| dc.title.alternative | MEMS-IR SENSOR 용 식각 - 접합 - 박막증착 기반공정 | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 대한전기학회 하계학술대회, pp.? | - |
| dc.citation.title | 대한전기학회 하계학술대회 | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | KO | - |
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