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Si micromachining for MEMS-IR sensor application

Other Titles

결정의존성 식각/기판접합을 이용한 MEMS용 구조물의 제작

Authors

박흥우; Ju Byeong Kwon; 박윤권; PARK JEONG HO; 김철주; Sang-Seop Yom; SUH SANG HEE; OH MYUNG HWAN

Citation

한국전기전자재료학회 춘계학술대회 논문집 = Proceedings of the Spring Symposium of KIEEME, pp.411 - 414

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/110084

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KIST Conference Paper > Others

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