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In-situ vacuum packaging method for FEDs in ultra-high-vacuum chamber

Authors

최우범; Ju Byeong Kwon; LEE YUN HI; 정지원; OH MYUNG HWAN; 정성재; LEE NAM YANG; 한정인; 조경익; 성만영

Citation

Proc. SID '98, pp.593 - 596

Keywords

MEMS

ISSN

0098-0966

URI

https://pubs.kist.re.kr/handle/201004/110111

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KIST Conference Paper > Others

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