DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.author정지원-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorCHOI DOO JIN-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T19:00:55Z-
dc.date.available2024-01-13T19:00:55Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110215-
dc.languageEnglish-
dc.subjectMEMS-
dc.titleSilicon-to-silicon electrostatic bonding using lithia-silicate glass interlayer-
dc.title.alternative리튬이 도핑된 박막을 이용한 실리콘 정전 열 접합-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국요업학회 춘계연구발표회, pp.92-
dc.citation.title한국요업학회 춘계연구발표회-
dc.citation.startPage92-
dc.citation.endPage92-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE