DSpace at KIST: Substrate-removed (SURE) optical waveguides in GaAs/AlGaAs epitaxial layers embedded in benzocyclobutene (BCB)

Full metadata record

DC Field	Value	Language
dc.contributor.author	Steven R. Sakamoto	-
dc.contributor.author	Cem Ozturk	-
dc.contributor.author	Byun Young Tae	-
dc.contributor.author	Jack Ko	-
dc.contributor.author	Nadir Dagli	-
dc.date.accessioned	2024-01-13T19:01:11Z	-
dc.date.available	2024-01-13T19:01:11Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/110231	-
dc.language	English	-
dc.subject	SUR optical waveguides	-
dc.subject	benzocyclobutene	-
dc.subject	Gats substrate set spray etch	-
dc.subject	propagation loss	-
dc.title	Substrate-removed (SURE) optical waveguides in GaAs/AlGaAs epitaxial layers embedded in benzocyclobutene (BCB)	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	Integrated Photonics Research 1998 : Technical Digest Series, v.4, pp.79 - 81	-
dc.citation.title	Integrated Photonics Research 1998 : Technical Digest Series	-
dc.citation.volume	4	-
dc.citation.startPage	79	-
dc.citation.endPage	81	-
dc.citation.conferencePlace	US	-

Show Simple Item Record

KIST Library Institutional Repository