Growth of thick GaN with GaN buffer layer on the various substrates using HVPE

Authors
이정욱백호선유지범Kim Gyeung HoKum Dong Wha
Citation
Abst. the 9th Seoul international symposium on the physics of semiconductors and applications (ISPSA, pp.110
Keywords
HVPE
URI
https://pubs.kist.re.kr/handle/201004/110320
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KIST Conference Paper > Others
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