KIST Library Institutional Repository

Etching effect of carbon tetrabromide in the vertical growth of GaAs during metalorganic chemical vapor deposition

Authors

SON CHANG-SIK; PARK YOUNG KYUN; Kim Seong Il

Citation

Abstracts of the 9th Seoul International Symposium on the Physics of Semiconductors and Applications, pp.135

Keywords

Etching effect

URI

https://pubs.kist.re.kr/handle/201004/110327

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML