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A study for the facet evolution of CCl4-doped Al0.5Ga0.5As/GaAs multilayers grown on patterned GaAs substrates by metalorganic chemical vapor deposition

Authors

KIM HEO JEN; SON CHANG-SIK; PARK YOUNG KYUN; KIM EUN KYU; 김태환

Citation

한국물리학회 회보 = Bulletin of the Korean Physical Society, v.16, no.2, pp.474

Keywords

facet evolution; AlGaAs; GaAs; metalorganic chemical vapor deposition

URI

https://pubs.kist.re.kr/handle/201004/110446

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KIST Conference Paper > Others

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