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Determining hardness and elastic modulus using load and displacement sensing indentation

Other Titles

미소하중 압입 방법에 의한 박막의 경도 및 탄성계수 측정

Authors

한준희; 허용학; 윤경진; Lee Kwang Ryeol; 심성민

Citation

Proc. of the Twelfth Conference on Mechanical Behaviors of Materials, Changwon, Korea, October 9-10,, pp.451 - 460

Keywords

미소하중 압입법; 박막의 기계적 특성; 경도; 탄성계수

URI

https://pubs.kist.re.kr/handle/201004/110487

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KIST Conference Paper > Others

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