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CF₄ synthesis by fluorination of CF₂Cl₂ and CCl₄

Other Titles

CF₂ Cl₂와 CCl₄의 불화에 의한 CF₄의 합성

Authors

Lee Youn-Woo; 이경환; Lim Jong Sung; Kim Jae Duck; LEE YOUN YONG

Citation

Theories and Applications of Chem. Eng., v.4, no.1, pp.317 - 320

Keywords

반도체용가스; 사불화메탄

URI

https://pubs.kist.re.kr/handle/201004/110545

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KIST Conference Paper > Others

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