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Performance characteristics of an in-situ particle monitor at subatmospheric pressures

Other Titles

감압상태에서 In-Situ Particle Monitor의 성능특성

Authors

Bae, Gwi-Nam

Citation

대한기계학회 1998 년도 추계학술대회논문집 B, pp.382 - 386

URI

https://pubs.kist.re.kr/handle/201004/110617

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KIST Conference Paper > Others

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