DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorHong Kyu Jang-
dc.contributor.authorCHOI WON-KOOK-
dc.contributor.authorKOH SEOK KEUN-
dc.contributor.authorK. H. Kim-
dc.contributor.authorD. J. Choi-
dc.contributor.authorS. Han-
dc.contributor.authorS. C. Choi-
dc.contributor.author정형진-
dc.date.accessioned2024-01-13T20:33:25Z-
dc.date.available2024-01-13T20:33:25Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111163-
dc.languageEnglish-
dc.subjectthermal stability-
dc.titleThermal stability of Cu films on TiN/Ti/Si(100) by partially ionized beam deposition-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMat. res. soc. symp. proc., v.438, pp.387 - ?-
dc.citation.titleMat. res. soc. symp. proc.-
dc.citation.volume438-
dc.citation.startPage387-
dc.citation.endPage?-
dc.citation.conferencePlaceUS-
dc.identifier.wosidA1997BH43C00057-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE