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The electrical and electron emission characteristics of diamond-like carbno film prepared onto Pt-coated silicon by plasma enhanced chemial vapor deposition

Authors

K. B. Lee; M. S. Kang; K. W. Park; T. W. Kim; M. R. Lee; C. T. Kim; Ju Byeong Kwon

Citation

Proc. MRS '97 fall meeting, Boston, USA, pp.?

Keywords

FED; FEA; diamond like carbon

URI

https://pubs.kist.re.kr/handle/201004/111171

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KIST Conference Paper > Others

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