DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorYoon Young Soo-
dc.contributor.authorJoon Han Kim-
dc.contributor.authorT.H. Lim-
dc.contributor.authorU.A. Bonne-
dc.contributor.authorA.M. Schmidt-
dc.contributor.authorD.L. Polla-
dc.date.accessioned2024-01-13T20:34:40Z-
dc.date.available2024-01-13T20:34:40Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111244-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectPZT film-
dc.subjectmicromaching-
dc.titleFabrication processes and characteristics of microelectromechanical system using PZT films-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMat. Res. Soc. Symp. Proc., v.444, pp.143 - 148-
dc.citation.titleMat. Res. Soc. Symp. Proc.-
dc.citation.volume444-
dc.citation.startPage143-
dc.citation.endPage148-
dc.citation.conferencePlaceUS-
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