Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안강호 | - |
| dc.contributor.author | Bae Gwi-Nam | - |
| dc.contributor.author | Chun-Sik Lee | - |
| dc.date.accessioned | 2024-01-13T21:02:07Z | - |
| dc.date.available | 2024-01-13T21:02:07Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111344 | - |
| dc.language | English | - |
| dc.subject | particle deposition velocity | - |
| dc.subject | rotating wafer | - |
| dc.subject | rotatingspeed | - |
| dc.title | Particle deposition velocities on a rotating wafer | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Proceedings of the 13th international symposium on contamination control., pp.465 - 469 | - |
| dc.citation.title | Proceedings of the 13th international symposium on contamination control. | - |
| dc.citation.startPage | 465 | - |
| dc.citation.endPage | 469 | - |
| dc.citation.conferencePlace | KO | - |
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