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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author정유호-
dc.contributor.authorJung Jae Hoon-
dc.contributor.author박흥우-
dc.contributor.author송만호-
dc.contributor.author김철주-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T21:02:34Z-
dc.date.available2024-01-13T21:02:34Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111371-
dc.languageEnglish-
dc.titleThe effect of wet-etching process on the gate insulator for fabrication of metal tip FEA-
dc.title.alternativeMetal tip FEA의 제조시 식각 용액이 게이트 산화막에 미치는 영향-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한전기학회 하계학술대회 논문집, 용평리조트, pp.1450 - 1452-
dc.citation.title대한전기학회 하계학술대회 논문집, 용평리조트-
dc.citation.startPage1450-
dc.citation.endPage1452-
dc.citation.conferencePlaceKO-
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