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The effect of wet-etching process on the gate insulator for fabrication of metal tip FEA

Other Titles

Metal tip FEA의 제조시 식각 용액이 게이트 산화막에 미치는 영향

Authors

Ju Byeong Kwon; 정유호; Jung Jae Hoon; 박흥우; 송만호; 김철주; LEE YUN HI; OH MYUNG HWAN

Citation

대한전기학회 하계학술대회 논문집, 용평리조트, pp.1450 - 1452

URI

https://pubs.kist.re.kr/handle/201004/111371

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KIST Conference Paper > Others

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