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Fabrication and characterization of DLC-coated field emitter arrays

Authors

KO CHANG GI; Ju Byeong Kwon; LEE YUN HI; Jung Ho Park; OH MYUNG HWAN

Citation

Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia., pp.226 - 230

Keywords

field emitter; CVD coatings; carbon; electron field emission; vacuum microelectronics; field emission display; micromachining; DLC-coated silicon tip

URI

https://pubs.kist.re.kr/handle/201004/111379

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KIST Conference Paper > Others

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