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dc.contributor.authorLee Kwang Ryeol-
dc.contributor.authorEUN KWANG YONG-
dc.contributor.author김명근-
dc.contributor.author최준엽-
dc.date.accessioned2024-01-13T21:04:07Z-
dc.date.available2024-01-13T21:04:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111463-
dc.languageEnglish-
dc.subjectdiamond-like carbon-
dc.titleStructure and mechanical properties of Si incorporated diamond-like carbon films prepared by PACVD.-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of the 1st international diamond symposium, 5-7 November 1996, Seoul, Korea, pp.164 - 169-
dc.citation.titleProceedings of the 1st international diamond symposium, 5-7 November 1996, Seoul, Korea-
dc.citation.startPage164-
dc.citation.endPage169-
dc.citation.conferencePlaceKO-
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