DSpace at KIST: 반도체용 Interconnect (Al-2Cu) 에서 reliability향상에 대한 열처리의 영향

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DC Field	Value	Language
dc.contributor.author	HAN JUN HYUN	-
dc.contributor.author	SHIN MYUNG CHUL	-
dc.date.accessioned	2024-01-13T21:04:34Z	-
dc.date.available	2024-01-13T21:04:34Z	-
dc.date.created	2021-09-29	-
dc.date.issued	1996-11	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/111491	-
dc.subject	semiconductor	-
dc.subject	interconnect	-
dc.subject	realiability	-
dc.title	반도체용 Interconnect (Al-2Cu) 에서 reliability향상에 대한 열처리의 영향	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국분석과학회 학술대회, pp.8	-
dc.citation.title	한국분석과학회 학술대회	-
dc.citation.startPage	8	-
dc.citation.endPage	8	-
dc.citation.conferencePlace	KO	-

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