Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim Tae Song | - |
dc.contributor.author | Dong-Joo Kim | - |
dc.contributor.author | Lee Jeon Kook | - |
dc.contributor.author | 정형진 | - |
dc.date.accessioned | 2024-01-13T21:32:06Z | - |
dc.date.available | 2024-01-13T21:32:06Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111629 | - |
dc.language | English | - |
dc.subject | non-volatile memory | - |
dc.subject | PZT | - |
dc.subject | sputtering process | - |
dc.subject | Ferroelectric thin films | - |
dc.title | Low temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | Ferroelectric thin films V, Mat. res. soc. symp. proc., v.433, pp.243 - 247 | - |
dc.citation.title | Ferroelectric thin films V, Mat. res. soc. symp. proc. | - |
dc.citation.volume | 433 | - |
dc.citation.startPage | 243 | - |
dc.citation.endPage | 247 | - |
dc.citation.conferencePlace | US | - |
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