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dc.contributor.authorKim Tae Song-
dc.contributor.authorDong-Joo Kim-
dc.contributor.authorLee Jeon Kook-
dc.contributor.author정형진-
dc.date.accessioned2024-01-13T21:32:06Z-
dc.date.available2024-01-13T21:32:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111629-
dc.languageEnglish-
dc.subjectnon-volatile memory-
dc.subjectPZT-
dc.subjectsputtering process-
dc.subjectFerroelectric thin films-
dc.titleLow temperature growth of PZT(52/48) thin films using r.f. magnetron sputtering method-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationFerroelectric thin films V, Mat. res. soc. symp. proc., v.433, pp.243 - 247-
dc.citation.titleFerroelectric thin films V, Mat. res. soc. symp. proc.-
dc.citation.volume433-
dc.citation.startPage243-
dc.citation.endPage247-
dc.citation.conferencePlaceUS-
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