DSpace at KIST: Laser direct dry etching for Al//0//.//3Ga//0//.//7As/GaAs multi-layer structure.

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DC Field	Value	Language
dc.contributor.author	Kim Seong Il	-
dc.contributor.author	Min Suk-Ki	-
dc.contributor.author	KIM EUN KYU	-
dc.contributor.author	박세기	-
dc.contributor.author	이천	-
dc.date.accessioned	2024-01-13T21:32:09Z	-
dc.date.available	2024-01-13T21:32:09Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/111632	-
dc.language	English	-
dc.subject	MOCVD	-
dc.title	Laser direct dry etching for Al//0//.//3Ga//0//.//7As/GaAs multi-layer structure.	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한전기학회 하계학술대회논문집 = Proc. KIEE '96 Ann. summer conf., pp.1980 - 1981	-
dc.citation.title	한전기학회 하계학술대회논문집 = Proc. KIEE '96 Ann. summer conf.	-
dc.citation.startPage	1980	-
dc.citation.endPage	1981	-
dc.citation.conferencePlace	KO	-

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