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Laser direct dry etching for Al//0//.//3Ga//0//.//7As/GaAs multi-layer structure.

Authors

Kim Seong Il; Min Suk-Ki; KIM EUN KYU; 박세기; 이천

Citation

한전기학회 하계학술대회논문집 = Proc. KIEE '96 Ann. summer conf., pp.1980 - 1981

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/111632

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KIST Conference Paper > Others

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