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Formation of SnO2-x thin film deposited by hybrid ion beam

Authors

KOH SEOK KEUN; CHO JUN SIK; Seok-Kyun Song; 최동수; CHOI WON-KOOK; 정형진

Citation

Korea-China international symposium (Peking, August, 1996), pp.?

Keywords

undoped tin oxide; reactive partially ionized beam; reactive ion-assisted deposition; average impinging energy; stannous tin; stannic tin

URI

https://pubs.kist.re.kr/handle/201004/111654

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KIST Conference Paper > Others

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