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Preparation of silicon oxide films using electron cyclotron resonance oxygen plasma

Other Titles

ECR 산소 플라즈마를 이용한 실리콘 산화막의 제조

Authors

허정수; JEON BUP JU; 윤용수; 정일현; Oh In Hwan; Lim Tae Hoon

Citation

Theories and applications of chem. res., v.2, no.1, pp.1001 - ?

URI

https://pubs.kist.re.kr/handle/201004/111662

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KIST Conference Paper > Others

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