Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Seong Il | - |
| dc.contributor.author | Min Suk-Ki | - |
| dc.contributor.author | 박세기 | - |
| dc.contributor.author | MIN BYUNG DON | - |
| dc.contributor.author | KIM MOO SUNG | - |
| dc.contributor.author | 이천 | - |
| dc.date.accessioned | 2024-01-13T21:33:18Z | - |
| dc.date.available | 2024-01-13T21:33:18Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111699 | - |
| dc.language | English | - |
| dc.subject | MOCVD | - |
| dc.title | Characteristics of laser dry etching for AlGaAs/GaAs multilayer. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | Proc. 3rd semicon. conf. Korea, pp.17 - 18 | - |
| dc.citation.title | Proc. 3rd semicon. conf. Korea | - |
| dc.citation.startPage | 17 | - |
| dc.citation.endPage | 18 | - |
| dc.citation.conferencePlace | KO | - |
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