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Characteristics of laser dry etching for AlGaAs/GaAs multilayer.

Authors

Kim Seong Il; Min Suk-Ki; 박세기; MIN BYUNG DON; KIM MOO SUNG; 이천

Citation

Proc. 3rd semicon. conf. Korea, pp.17 - 18

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/111699

Appears in Collections:

KIST Conference Paper > Others

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