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Effect of silicon orientation on the electrical properties of SiO//2 using oxygen plasma.

Other Titles

실리콘의 Orientation 이 산소 플라즈마에 의해 제조된 실리콘 산화막의 전기적 특성에 미치는 영향 =

Authors

Oh In Hwan; Lim Tae Hoon; 허정수; JEON BUP JU; 정일현

Citation

Theories and applications of chem. res., v.v. 2, no.no. 2, pp.2595 - ?

URI

https://pubs.kist.re.kr/handle/201004/111747

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KIST Conference Paper > Others

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