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dc.contributor.authorLee Kwang Ryeol-
dc.contributor.author박해석-
dc.contributor.author안정훈-
dc.contributor.author권동일-
dc.date.accessioned2024-01-13T22:02:18Z-
dc.date.available2024-01-13T22:02:18Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111897-
dc.languageEnglish-
dc.subject박막-
dc.titleEvaluation of micromechanical properties of Brittle thin films by applying advanced indentation methods.-
dc.title.alternative압입경도시험법의 응용에 의한 경질박막의 기계적 물성 평가 =-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProc. 9th conf. mechanical behaviors of materials, pp.479 - 500-
dc.citation.titleProc. 9th conf. mechanical behaviors of materials-
dc.citation.startPage479-
dc.citation.endPage500-
dc.citation.conferencePlaceKO-
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KIST Conference Paper > Others
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