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Evaluation of micromechanical properties of Brittle thin films by applying advanced indentation methods.

Other Titles

압입경도시험법의 응용에 의한 경질박막의 기계적 물성 평가 =

Authors

Lee Kwang Ryeol; 박해석; 안정훈; 권동일

Citation

Proc. 9th conf. mechanical behaviors of materials, pp.479 - 500

Keywords

박막

URI

https://pubs.kist.re.kr/handle/201004/111897

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KIST Conference Paper > Others

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