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Lateral growth rate enhancement on patterned GaAs substrates with CCl//4 by MOCVD.

Authors

KIM YOUN; Kim Seong Il; 황성민; KIM MOO SUNG; Min Suk-Ki

Citation

22nd Institute symp. compound semiconductor, v.no. 145, pp.137 - 142

Keywords

GaAs

URI

https://pubs.kist.re.kr/handle/201004/111962

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KIST Conference Paper > Others

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