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dc.contributor.authorKIM YOUN-
dc.contributor.authorKIM MOO SUNG-
dc.contributor.authorKim Seong Il-
dc.contributor.author황성민-
dc.contributor.authorKANG JOON MO-
dc.contributor.author박양근-
dc.contributor.authorMin Suk-Ki-
dc.date.accessioned2024-01-13T22:03:45Z-
dc.date.available2024-01-13T22:03:45Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111984-
dc.languageEnglish-
dc.subjectMOCVD-
dc.titleEnhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 1st inter. conf. on low dimensional structures and devices, pp.27 - ?-
dc.citation.titleThe 1st inter. conf. on low dimensional structures and devices-
dc.citation.startPage27-
dc.citation.endPage?-
dc.citation.conferencePlaceSI-
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KIST Conference Paper > Others
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