DSpace at KIST: A study on the particle deposition toward a rotating wafer surface.

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DC Field	Value	Language
dc.contributor.author	Bae Gwi-Nam	-
dc.contributor.author	안강호	-
dc.date.accessioned	2024-01-13T22:04:18Z	-
dc.date.available	2024-01-13T22:04:18Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112017	-
dc.language	English	-
dc.subject	particle deposition	-
dc.subject	입자침착	-
dc.subject	회전웨이퍼	-
dc.subject	입자침착속도	-
dc.subject	회전속도	-
dc.title	A study on the particle deposition toward a rotating wafer surface.	-
dc.title.alternative	회전 웨이퍼상의 입자침착에 관한 연구 =	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	대한기계학회 1995 년도 추계학술대회논문집 (II)., pp.350 - 354	-
dc.citation.title	대한기계학회 1995 년도 추계학술대회논문집 (II).	-
dc.citation.startPage	350	-
dc.citation.endPage	354	-
dc.citation.conferencePlace	KO	-

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