DSpace at KIST: The effect of H//2O from SOG on the reliability of submicron vias.

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DC Field	Value	Language
dc.contributor.author	Jung Woo Sang	-
dc.contributor.author	위영진	-
dc.contributor.author	최길현	-
dc.contributor.author	이상인	-
dc.contributor.author	AHN SUNG TAE	-
dc.date.accessioned	2024-01-13T22:30:57Z	-
dc.date.available	2024-01-13T22:30:57Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112084	-
dc.language	English	-
dc.subject	via poisoning	-
dc.title	The effect of H//2O from SOG on the reliability of submicron vias.	-
dc.title.alternative	SOG 에서의 H//2O 방출이 Submicron via 의 신뢰성에 미치는 영향 =	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	제 8 회 반도체 기술 발표회, v.v. 8, pp.127 - 133	-
dc.citation.title	제 8 회 반도체 기술 발표회	-
dc.citation.volume	v. 8	-
dc.citation.startPage	127	-
dc.citation.endPage	133	-
dc.citation.conferencePlace	KO	-

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