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The effect of H//2O from SOG on the reliability of submicron vias.

Other Titles

SOG 에서의 H//2O 방출이 Submicron via 의 신뢰성에 미치는 영향 =

Authors

Jung Woo Sang; 위영진; 최길현; 이상인; AHN SUNG TAE

Citation

제 8 회 반도체 기술 발표회, v.v. 8, pp.127 - 133

Keywords

via poisoning

URI

https://pubs.kist.re.kr/handle/201004/112084

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KIST Conference Paper > Others

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