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Synthesis of diamond thick films by DC PACVD

Authors

LEE JAE KAP; Lee Wook Seong; Baik Young Joon; EUN KWANG YONG

Citation

Advances in new diamond science and technology, pp.69 - 72

Keywords

diamond deposition; DC PACVD; thick film; CVD diamond; methane concentration; morphology; FWHM

URI

https://pubs.kist.re.kr/handle/201004/112143

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KIST Conference Paper > Others

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